Typical [20]. The measured S-parameters may 0.07 –

Typical S parameters of up state is shown in FIG. Insertion loss, 20 GHz, 5 return loss between a good and -0.2 dB than -0.8 dB to 30 GHz is 28 GHz or less than -10 dB. -parameters experimental S are compared with the results of the circuit simulation performed using Agilent Advanced Design System commercially available software package (see Figure 5). For these simulations, together, associated expression equivalent resistor have previously been proposed – inductor – a capacitor (RLC) circuit model, we used the 20. The measured S-parameters may 0.07 – pF up equivalent capacitance (the cup), have been found to be described by the results provided by the circuit simulation.


S parameters of the simulated results with the down state is shown in FIG. 6. is better than -0.4 dB in the frequency range, which is almost all measured return loss, it will be observed at 23 GHz of resonance frequency (F0) (Isolation -38 dB). Specifically, circuit simulation, adjustable series capacitor (CS) can describe the experimental data with the proviso that it is added to the RLC model. 20 As reported in the reason for the series capacitance of this additional, perhaps poor flat actuation bridge bridges due to both the residual stress and stress gradient of resulting suspension gold film as a dielectric of the underlying There is the residual air gap between the. Curvature in the central region of the bridge, in fact, can be noticed in Figure 1. 4. The value of the lumped element in the best equivalent RLC circuit that describes the experimental data as follows where it has been found is: R = 0.39?, pH of L = 34.52, C = 18.14 pF about, and Cs = about 1.43 pF. 



The value of Cs is consistent with the capacitance to be related to the effective area of the bridge portion over the center conductor (the total area of the following hole is 150 × 250?m2) an air gap of 200nm is present is calculated you have. In addition, the air gap of 200nm is done in the test switch using Ansoft’s HFSS simulator obtained by the 3-D electrical simulation (not shown here). Due to the contribution of the Cs, the results of the total down capacitance (Cdown) is, to be 1.32 pF, therefore, was found to be a volume ratio Cdown / cup to 19. Inset shows the resonance frequency of the switch having a bridge of the same width as the different lengths. Incidentally, f0, consistent with an increase in the contribution of inducible by increasing the bridge length in the range 450-750Myuemu, child reduced from about 30 to 15 GHz.


Reliability tests were conducted in a volume switch has been achieved by applying a voltage pulse (50% duty cycle at a 1 millisecond) 15 ~ 20 V. Although S-parameter was found to be not even shown one million after no change cycle, the curved shape of the bridge, will affect the reproducibility of results. On the other hand, mainly for apparent stiction phenomenon induced by the dielectric charge of the applied voltage near actuated, thus it has been found that only occurs for approximately 100 volts of high voltage, poor flatness of the bridge, There is the most limiting factor for reliability switch of here in the study.